Title

Modeling The Fabrication Of Nano-Optical Structures

Keywords

Band gap; Fabrication; Lithography; Meta-materials; Modeling; Nanophotonics; Photonic crystals; Simulation

Abstract

Over the last two decades, considerable research has been devoted to micro-optic and now nano-optical structures. Fabrication methods have become sufficiently mature to realize most concepts, but due to physics inherent in the process, geometry is distorted. Edges are rounded, sidewalks are sloped, surfaces are rough, and etching or deposition not uniform. Deviations from "perfect" geometry can dramatically affect optical behavior. In order to address the impact of the "non-perfect" nature of fabrication, numerical methods for modeling fabrication is discussed and quantified for various examples. As an example, comprehensive modeling of near-field nano-patterning is described. Numerical and experimental results are presented of three-dimensional photonic crystals fabricated in a contact mask aligner using a standard UV lamp as the source.

Publication Date

5-3-2006

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

6110

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.652604

Socpus ID

33646024009 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/33646024009

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