Title

Design And Analysis Of A Miniature Reciprocating Compressor Driven By A Comb Drive

Abstract

The design and working principle of a miniature reciprocating compressor driven by an electrostatic comb drive is presented and its basic parameters are discussed. The compressor, which is 6 mm in diameter and less than 0.5 mm in thickness, has a simple structure consisting of a compressor chamber, a corrugation diaphragm driven by a vertical comb-drive, and two active micro-valves. Using air as working medium, the simple mechanical system enables a compression ratio of 1.5. With a working voltage of 320V, the device gives flow rates of 2.7 ml/ min. The three-dimensional flow field in the chamber is also simulated using a commercial computational fluid dynamics software.

Publication Date

1-1-2000

Publication Title

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volume

2000-B

Number of Pages

111-118

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1115/IMECE2000-1303

Socpus ID

85119678470 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/85119678470

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