Title
Mechanical Properties Of Pdms Membrane And Influences Of Commonly Used Chemicals In Microfabrication
Abstract
Microfluidics is both a science and a technology that offers great and perhaps even revolutionary capabilities to impact the society in the future. Polydimethylsiloxane (PDMS) has been widely used in fabricating microfluidic systems but few attentions were paid in the past to mechanical properties of PDMS. Very importantly there is no report on influences of microfabrication processes which normally involve chemical reaction processes. A comprehensive investigation was made by authors to study fundamental issues regarding chemical emersion and their effects on mechanical properties of PDMS. Results shown in this work can be used to guide future developments of microfluidics in utilizing PDMS especially those devices involve actuation of PDMS membranes. Copyright © 2008 by ASME.
Publication Date
12-1-2008
Publication Title
2008 Proceedings of the ASME - 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008
Number of Pages
551-556
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1115/MicroNano2008-70343
Copyright Status
Unknown
Socpus ID
69949145158 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/69949145158
STARS Citation
Liu, Miao; Sun, Jianren; Sun, Ying; and Chen, Quanfang, "Mechanical Properties Of Pdms Membrane And Influences Of Commonly Used Chemicals In Microfabrication" (2008). Scopus Export 2000s. 9624.
https://stars.library.ucf.edu/scopus2000/9624