Title

Study Of The Acoustoelectric Effect For Saw Sensors

Abstract

Research has recently begun on the use of ultrathin films and nanoclusters as mechanisms for sensing of gases, liquids, etc., because the basic material parameters may change because of film morphology. As films of various materials are applied to the surface of SAW devices for sensors, the conductivity of the films may have a strong acoustoelectric effect, whether desired or not. The purpose of this paper is to reexamine the theory and predictions of the acoustoelectric effect for SAW interactions with thin conducting or semi-conducting films. The paper will summarize the theory and predict the effects of thin film conductivity on SAW velocity and propagation loss versus frequency and substrate material. The theory predicts regions of conductivity which result in extremely high propagation loss, and which also correspond to the mid-point between the open and short-circuit velocities. As an example of the verification and possible usefulness of the acoustoelectric effect, recent experimental results of palladium (Pd) thin films on a YZ LiNbO3 SAW delay line have shown large changes in propagation loss, depending on the Pd film thickness, exposure to hydrogen gas, or both. By proper design, a sensitive hydrogen leak detector SAW sensor can be designed. © 2006 IEEE.

Publication Date

3-1-2010

Publication Title

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volume

57

Issue

3

Number of Pages

698-706

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/TUFFC.2010.1467

Socpus ID

77949380566 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/77949380566

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