Title

Efficient Specification And Characterization Of Surface Roughness For Extreme Ultraviolet Optics

Keywords

EUV optics; HSFR; light scattering; power spectral density; roughness

Abstract

EUV mirrors are cutting-edge optical surfaces. Meeting the roughness specifications over the entire range of relevant spatial frequencies is a challenging process. Recent developments that might help to increase the efficiency of EUV mirror production will be discussed including relaxed roughness specifications using the new Generalized Harvey Shack theory as well as a new approach for roughness measurements during and after manufacturing based on light scattering measurements and analysis. The method provides area covering images of the distribution of high-spatial frequency roughness (HSFR) over entire mirrors. Results will be presented for 660 mm diameter EUV collector mirror substrates. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).

Publication Date

6-8-2011

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

7969

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.891280

Socpus ID

79957951973 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/79957951973

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