Title

Electric-Field-Driven Nano-Oxidation Trimming Of Silicon Microrings And Interferometers

Abstract

Nanoscale disorder results in severe spectral misalignment of silicon microring resonators and Mach-Zehnder interferometers. We correct for such effects using electric-field-induced waveguide nano-oxidation, demonstrating a tuning wavelength range of several nanometers and 0:002nm resolution without line shape degradation. Fieldinduced nano-oxidation is a permanent and precise technique and requires no new materials or high-temperature processing. © 2011 Optical Society of America.

Publication Date

7-15-2011

Publication Title

Optics Letters

Volume

36

Issue

14

Number of Pages

2668-2670

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1364/OL.36.002668

Socpus ID

79960541271 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/79960541271

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