Title
Electric-Field-Driven Nano-Oxidation Trimming Of Silicon Microrings And Interferometers
Abstract
Nanoscale disorder results in severe spectral misalignment of silicon microring resonators and Mach-Zehnder interferometers. We correct for such effects using electric-field-induced waveguide nano-oxidation, demonstrating a tuning wavelength range of several nanometers and 0:002nm resolution without line shape degradation. Fieldinduced nano-oxidation is a permanent and precise technique and requires no new materials or high-temperature processing. © 2011 Optical Society of America.
Publication Date
7-15-2011
Publication Title
Optics Letters
Volume
36
Issue
14
Number of Pages
2668-2670
Document Type
Article
Personal Identifier
scopus
DOI Link
https://doi.org/10.1364/OL.36.002668
Copyright Status
Unknown
Socpus ID
79960541271 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/79960541271
STARS Citation
Shen, Yiran; Divliansky, Ivan B.; Basov, Dimitri N.; and Mookherjea, Shayan, "Electric-Field-Driven Nano-Oxidation Trimming Of Silicon Microrings And Interferometers" (2011). Scopus Export 2010-2014. 2585.
https://stars.library.ucf.edu/scopus2010/2585