Title

Multi-Layer Far-Infrared Component Technology

Keywords

Bragg mirror; Far-infrared; silicon; Terahertz; thin-film optics

Abstract

Multi-layer thin-film optics based on alternating sub-wavelength layers of silicon and air provide high index contrast to create improved components with just a few layers. Applications include ultra-high reflectivity mirrors, band-pass and band-blocking filters, anti-reflection coatings, and compact high-resolution Fabry-Perot spectrometers with broad freespectral- range. Such components may be integrated directly into airborne/satellite and man-portable sensing instrumentation. We demonstrate a process to produce ultrathin silicon optical elements with an integral raised spacer rim to provide the requisite air gap when these elements are combined directly into a Bragg stack. Laboratory measurements confirm theoretical design specifications. Individual elements may be stacked and bonded to form Bragg mirrors and other thin-film optics. © 2010 Copyright SPIE - The International Society for Optical Engineering.

Publication Date

11-8-2010

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

7817

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.861598

Socpus ID

78049408060 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/78049408060

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