Title

A Structural Health Monitoring System With Ultrasonic Mems Transducers

Keywords

ARX; CMUT; Lamb wave; MEMS; NDE; SHM; time reversal; ultrasound

Abstract

In this paper, we will summarize our efforts on exploring guided acoustic waves generated by MEMS ultrasonic transducers enabling a non-destructive, ultra-low powered, wireless SHM system. State-of-the-art SHM systems employ bulk piezoelectric transducers. However, they are not environmentally benign (contain lead), not cost feasible for monitoring every bridge in the U.S., require significant power for operation, lack integration capability for wireless interrogation, need precise matching layers, and have only 25-50 percent fractional bandwidth, limiting the detection resolution. To alleviate most of these shortcomings, a low impedance MEMS transducer, called a capacitive micromachined ultrasonic transducer (CMUT), is explored. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).

Publication Date

5-26-2011

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

7981

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.881036

Socpus ID

79956295711 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/79956295711

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