Title

Optical And Sensory Properties Of Zno Nanofibrous Layers Grown By Magnetron Sputtering

Keywords

magnetron sputtering; photoluminescence; sensor; UV; XRD; ZnO nanofibrous

Abstract

This paper presents optical and sensory properties of ZnO nanofirous layers grown by a cost-effective and fast fabrication method based on magnetron sputtering. The as-prepared nanofibrous layers show good conductive properties which are of interest for gas sensing structures. Their application for hydrogen detection is demonstrated in premiere, and the developed H2 sensor structure exhibits good response / recovery behavior under ultraviolet (UV) light, and good sensitivity. This method is cost-effective and facile and has a great potential for various sensorial applications. © 2012 IEEE.

Publication Date

12-1-2012

Publication Title

Proceedings of the International Semiconductor Conference, CAS

Volume

1

Number of Pages

139-142

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/SMICND.2012.6400674

Socpus ID

84872859814 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84872859814

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