Title
Propagation And Stability Characteristics Of Laminar Lifted Diffusion Flame Base
Keywords
CIGS thin film solar cells; DC magnetron sputtering; Mo back contact
Abstract
Molybdenum back contact in CuIn 1-xGa xSe 2-yS y (CIGSeS) solar cells is usually deposited using DC magnetron sputtering. Properties of thin films are dependent on process parameters. Films deposited at high power and low pressure, tend to be more conductive. However, such films exhibit poor adhesional strength since the films are under compressive stress. Films deposited at low power and high pressure tend to be under tensile stress and exhibit higher roughness and resistivity, while the films adhere very well to the sodalime glass substrate. Therefore, it has been a practice to deposit multi-layered Mo back contact to achieve properties of good adhesion and higher conductivity. Deposition of multi-layered back contact results in either increase in deposition time if a single target is used or increase in foot print if multiple targets are used resulting in an increase in the total cost of production. Experiments were carried out to understand the effects of working pressure, sputtering power and working distance on molybdenum film properties with the final aim to develop a process recipe for deposition of a single molybdenum film with acceptable properties of both good adhesion and higher conductivity. Experiments were carried out by varying the working pressure and keeping the sputtering power constant and then varying the sputtering power keeping the working pressure constant. Adhesive tape test was performed on each film to determine the adhesional strength of the films. Moreover, the sheet resistance and the average roughness for each film were measured using a four probe measurement setup and the Dektak Profilometer, respectively. All experiments were also carried out on narrow and long glass strips in order to estimate the residual stress in the film using the bend test method. © 2012 Elsevier B.V. All rights reserved.
Publication Date
5-1-2012
Publication Title
Combustion and Flame
Volume
159
Number of Pages
1821-1831
Document Type
Article
Personal Identifier
scopus
DOI Link
https://doi.org/10.1016/j.combustflame.2012.01.016
Copyright Status
Unknown
Socpus ID
84857920736 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/84857920736
STARS Citation
Chen, Ruey Hung; Li, Zhiliang; and Phuoc, Tran X., "Propagation And Stability Characteristics Of Laminar Lifted Diffusion Flame Base" (2012). Scopus Export 2010-2014. 5272.
https://stars.library.ucf.edu/scopus2010/5272