Title

Patterning And Hardening Of Gold Black Infrared Absorber By Shadow Mask Deposition With Ethyl Cyanoacrylate

Keywords

Absorptance; Aging effect studies; Goldblack patterning; Polymer infusion; Shadow mask

Abstract

Patterning of gold-black infrared absorbing films by stencil lithography and hardening by polymer infusion is reported. Gold black nano-structured films are deposited through a thin metal shadow mask in a thermal evaporator in ~400 mTorr pressure of inert gas, followed by ethyl cyanoacrylate fuming through the same mask to produce rugged IR absorptive patterns of ~100 micron scale dimensions. Infrared absorptivity is determined by transmission and reflectivity measurements using a Fourier spectrometer and infrared microscope. Results indicate that the optimized hardening process reduces the usual degradation of the absorptivity with age. This work has potential application to infrared array bolometers. © 2013 SPIE.

Publication Date

8-7-2013

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

8708

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.2018082

Socpus ID

84881007479 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84881007479

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