Title

Mid-Infrared Silicon Platform For Chip-Scale Chemical Sensors

Keywords

Lab-on-a-chip; Mid-Infrared; Silicon microphotonics

Abstract

Mid-Infrared optofluidics based silicon sensor platforms are demonstrated. Silicon is a great candidate for mid-infrared optofluidics for the following reasons: (1) Silicon has a broad transmission window up to 7 urn (2) Silicon offers CMOS compatible and monolithic fabrication (3) Silicon has high chemical resistance that can withstand high temperature, acid/base solution and organic solvents. (4) Silicon is a non-toxic environmentally friendly material. The fabricated mid-infrared optofluidic sensor can replace bulky instruments, such as FTIR, with a lab-on-a-chip system, while achieving much higher sensitivity.

Publication Date

8-9-2013

Publication Title

Technical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013

Volume

2

Number of Pages

48-50

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

84881098228 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84881098228

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