Title
Mid-Infrared Silicon Platform For Chip-Scale Chemical Sensors
Keywords
Lab-on-a-chip; Mid-Infrared; Silicon microphotonics
Abstract
Mid-Infrared optofluidics based silicon sensor platforms are demonstrated. Silicon is a great candidate for mid-infrared optofluidics for the following reasons: (1) Silicon has a broad transmission window up to 7 urn (2) Silicon offers CMOS compatible and monolithic fabrication (3) Silicon has high chemical resistance that can withstand high temperature, acid/base solution and organic solvents. (4) Silicon is a non-toxic environmentally friendly material. The fabricated mid-infrared optofluidic sensor can replace bulky instruments, such as FTIR, with a lab-on-a-chip system, while achieving much higher sensitivity.
Publication Date
8-9-2013
Publication Title
Technical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013
Volume
2
Number of Pages
48-50
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
Copyright Status
Unknown
Socpus ID
84881098228 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/84881098228
STARS Citation
Lin, Pao Tai; Lin, Hao Yu Greg; Singh, Vivek; Patel, Neil Sunil; and Hu, Juejun, "Mid-Infrared Silicon Platform For Chip-Scale Chemical Sensors" (2013). Scopus Export 2010-2014. 6079.
https://stars.library.ucf.edu/scopus2010/6079