Title
Fabrication Of Nano-Scaled Polymer-Derived Sialcn Ceramic Components Using Focused Ion Beam
Abstract
Fully dense polymer-derived amorphous silicoaluminum carbonitride (SiAlCN) ceramics were synthesized from polysilazane as preceramic precursors followed by a thermal decomposition process. The nanofabrication of amorphous SiAlCN ceramics was implemented with a focused ion beam (FIB). FIB conditions such as the milling rate, the beam current, and the number of passes were considered. It was found that nanopatterns with a feature size of less than 100 nm could be fabricated onto polymer-derived ceramics (PDCs) precisely and quickly. Specific nanostructures of thin walls, nozzle, and gear have been fabricated as demonstrations, indicating that the FIB technique was a promising method to realize nanostructures on PDCs, especially for microelectromechanical system and micro/nano-sensor applications. © 2013 IOP Publishing Ltd.
Publication Date
9-1-2013
Publication Title
Journal of Micromechanics and Microengineering
Volume
23
Issue
9
Number of Pages
-
Document Type
Article
Personal Identifier
scopus
DOI Link
https://doi.org/10.1088/0960-1317/23/9/095035
Copyright Status
Unknown
Socpus ID
84884823569 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/84884823569
STARS Citation
Tian, Ye; Shao, Gang; Wang, Xingwei; and An, Linan, "Fabrication Of Nano-Scaled Polymer-Derived Sialcn Ceramic Components Using Focused Ion Beam" (2013). Scopus Export 2010-2014. 6144.
https://stars.library.ucf.edu/scopus2010/6144