Title

Fabrication Of Nano-Scaled Polymer-Derived Sialcn Ceramic Components Using Focused Ion Beam

Abstract

Fully dense polymer-derived amorphous silicoaluminum carbonitride (SiAlCN) ceramics were synthesized from polysilazane as preceramic precursors followed by a thermal decomposition process. The nanofabrication of amorphous SiAlCN ceramics was implemented with a focused ion beam (FIB). FIB conditions such as the milling rate, the beam current, and the number of passes were considered. It was found that nanopatterns with a feature size of less than 100 nm could be fabricated onto polymer-derived ceramics (PDCs) precisely and quickly. Specific nanostructures of thin walls, nozzle, and gear have been fabricated as demonstrations, indicating that the FIB technique was a promising method to realize nanostructures on PDCs, especially for microelectromechanical system and micro/nano-sensor applications. © 2013 IOP Publishing Ltd.

Publication Date

9-1-2013

Publication Title

Journal of Micromechanics and Microengineering

Volume

23

Issue

9

Number of Pages

-

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1088/0960-1317/23/9/095035

Socpus ID

84884823569 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84884823569

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