Title

The Effect Of Substrate Temperature And Source Flux On Cubic Znmgo Uv Sensors Grown By Plasma-Enhanced Molecular Beam Epitaxy

Keywords

Cubic ZnMgO; Deep ultraviolet; Optoelectronics; Oxide MBE

Abstract

Cubic ZnMgO films were grown by plasma-enhanced molecular beam epitaxy on MgO substrates. Interdigitatal metal-semiconductor-metal contacts were fabricated with Ni/Mg/Au to investigate the effect of growth temperature and source flux ratio on UV sensor properties. Device spectral responsivity was found to decrease with increasing Mg content, while UV-visible rejection ratio correspondingly increased. Peak responsivities ranged from 236 nm to 260 nm, spanning from 10 mA/W in the single crystal, high Mg case to ∼500 A/W for phase segregated films. UV-visible rejection ratios increased with increasing Mg content to three orders of magnitude. Solar blind detectors were realized with single-crystal ZnMgO, while effective visible blind detectors were made with phase-segregated ZnMgO films. © 2013 Elsevier B.V. All rights reserved.

Publication Date

11-1-2013

Publication Title

Applied Surface Science

Volume

284

Number of Pages

254-257

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/j.apsusc.2013.07.090

Socpus ID

84883880035 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84883880035

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