Title
Study Of The Laser Scribing Of Molybdenum Thin Films Fabricated Using Different Deposition Techniques
Keywords
CIGS; Laser Scribing; Molybdenum Thin Film; Monolithic Integration; Photovoltaics; Thin-Film Solar Cells
Abstract
Monolithic cell interconnection is a technique used in solar devices to allow for interconnection of adjacent cells through patterning of the thin films during fabrication. In the case of CuIn1-xGaxSe2-ySy (CIGS) solar cells, Molybdenum is commonly used as the back contact. Patterning of this layer is required in the interconnection scheme to electrically isolate adjacent cells. Laser scribing has been adopted for patterning of this layer. This paper reports on the effect of the molybdenum thin film deposition technique, and the resulting film properties, on the characteristic of the laser scribe. Films were deposited using DC magnetron sputtering over a range of working gas pressures and powers as well as in single and multilayer configurations. It was found that the residual stress within the film lead to significantly different laser ablation processes. This required independent tuning of the laser processing parameters to create a clean, defect free scribe for different samples. Experimentation was carried out using both film-side and glass-side processing. It was shown that glass-side processing leads to a reduction in cracks and delamination originating from the scribe. The processing conditions that produced successful scribe lines for the various films are presented and discussed. © 2013 SPIE.
Publication Date
11-4-2013
Publication Title
Proceedings of SPIE - The International Society for Optical Engineering
Volume
8826
Number of Pages
-
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1117/12.2024430
Copyright Status
Unknown
Socpus ID
84886715123 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/84886715123
STARS Citation
Schneller, Eric; Dhere, Neelkanth G.; Shimada, Juliana; and Kar, Aravinda, "Study Of The Laser Scribing Of Molybdenum Thin Films Fabricated Using Different Deposition Techniques" (2013). Scopus Export 2010-2014. 6436.
https://stars.library.ucf.edu/scopus2010/6436