Title

Thermal Nanoimprint Fabrication Of Chalcogenide Glass Waveguide Resonators On Nonconventional Plastic Substrates

Abstract

We demonstrated thermal nanoimprint fabrication of photonic devices in chalcogenide glass films on both semiconductor and nonconventional plastic substrates. A high micro-ring intrinsic quality factor of 3 × 10 5 is achieved at 1550 nm wavelength. © 2013 IEEE.

Publication Date

11-18-2013

Publication Title

2013 IEEE Photonics Society Summer Topical Meeting Series, PSSTMS 2013

Number of Pages

66-67

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/PHOSST.2013.6614542

Socpus ID

84887414689 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84887414689

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