Title

Nanoscale Optical Features Via Hot-Stamping Of As2Se3 Glass

Keywords

Chalcogenide - Glass - Hot-pressing - Nanoimprinting - Patterning

Abstract

Here we show our ability to fabricate two-dimensional (2D) gratings on chalcogenide glasses with peak-to-valley amplitude of -200 nm. The fabrication method relies on the thermal nano-imprinting of the glass substrate or film in direct contact with a patterned stamp. Stamping experiments are carried out using a bench-top precision glass-molding machine, both on As2Se 3 optically-polished bulk samples and thermally-evaporated thin films. The stamps consist of silicon wafers patterned with sub-micron lithographically defined features. We demonstrate that the fabrication method described here enables precise control of the glass' viscosity, mitigates risks associated with internal structural damages such as dewetting, or parasitic crystallization. The stamping fidelity as a function of the Time-Force- Temperature regime is discussed, and further developments and potential applications are presented. © 2013 SPIE.

Publication Date

11-28-2013

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

8884

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.2029274

Socpus ID

84888139807 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84888139807

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