Title
Improved Control Of The Phosphorous Surface Concentration During In-Line Diffusion Of C-Si Solar Cells By Apcvd
Keywords
APCVD; Diffusion; Phosphorus; Silicate glasses; Silicon; Solar cells
Abstract
Emitter formation for industrial crystalline silicon (c-Si) solar cells is demonstrated by the deposition of phosphorous-doped silicate glasses (PSG) on p-type monocrystalline silicon wafers via in-line atmospheric pressure chemical vapor deposition (APCVD) and subsequent thermal diffusion. Processed wafers with and without the PSG layers have been analysed by SIMS measurements to investigate the depth profiles of the resultant phosphorous emitters. Subsequently, complete solar cells were fabricated using the phosphorous emitters formed by doped silicate glasses to determine the impact of this high-throughput doping method on cell performance. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Publication Date
5-1-2013
Publication Title
Physica Status Solidi - Rapid Research Letters
Volume
7
Issue
5
Number of Pages
319-321
Document Type
Article
Personal Identifier
scopus
DOI Link
https://doi.org/10.1002/pssr.201307020
Copyright Status
Unknown
Socpus ID
84877894742 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/84877894742
STARS Citation
Davis, Kristopher O.; Jiang, Kaiyun; Demberger, Carsten; Zunft, Heiko; and Haverkamp, Helge, "Improved Control Of The Phosphorous Surface Concentration During In-Line Diffusion Of C-Si Solar Cells By Apcvd" (2013). Scopus Export 2010-2014. 6894.
https://stars.library.ucf.edu/scopus2010/6894