Title

Demonstration Of High-Q Mid-Infrared Chalcogenide Glass-On-Silicon Resonators

Abstract

We demonstrated high-index-contrast, waveguide-coupled As 2Se3 chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 × 105 at 5.2 μm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits. © 2013 Optical Society of America.

Publication Date

5-1-2013

Publication Title

Optics Letters

Volume

38

Issue

9

Number of Pages

1470-1472

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1364/OL.38.001470

Socpus ID

84877116919 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84877116919

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