Title

Near-Field Electrospray Microprinting Of Polymer-Derived Ceramics

Keywords

Electrospray (ES); high temperature; polymer-derived ceramics (PDCs); printing

Abstract

Ceramic microelectromechanical systems (MEMS) sensors are potentially game-changing devices in many applications in high-temperature and corrosive environments, where the use of conventional MEMS materials such as silicon is prohibited. However, the microfabrication of ceramic MEMS devices remains a major technical challenge. Here, we report a method to directly print micro ceramic patterns using near-field electrospray (ES) of polymer-derived ceramics (PDCs). We demonstrated that the viscous ceramic precursor liquids can be printed reliably without any clogging problem. The spray self-expansion due to Coulombic repulsion force among charged droplets can be suppressed by decreasing the droplet residence time in space. A spray expansion model is used to predict the line width, and the results are in decent agreement with the experiments. We demonstrated a 1-D printed polymer feature as narrow as 35 μm and a micro pentagram pattern. Moreover, after the pyrolysis of PDC at 1100 × in nitrogen, amorphous alloys of silicon, carbon, and nitrogen (SiCN) are obtained. The samples show good integrity and adhesion to the substrate. The near-field ES PDC printing can become a useful addition to the toolbox of high-temperature MEMS.[2012-0249] © 2012 IEEE.

Publication Date

1-1-2013

Publication Title

Journal of Microelectromechanical Systems

Volume

22

Issue

1

Number of Pages

1-3

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/JMEMS.2012.2226932

Socpus ID

84873293922 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84873293922

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