Title

Piezoelectric Resonant Mems Balances With High Liquid Phase Q

Keywords

Biosensor; MEMS; Piezoelectric resonator; Quality factor

Abstract

This work presents low motional resistance piezoelectric MEMS resonators with the highest quality factor (Q) in water reported to date that can be used for direct biomarker or chemical detection in liquid media. Thin film Piezoelectric-on-substrate (TPoS) resonators operating in higher order lateral bulk acoustic modes are designed and fabricated, and their performance as mass balances in water is characterized. Q up to 312 and motional resistance as low as 662Ω were measured in water for devices with resonant frequency of 11MHz. To characterize resonator mass sensitivities, a SiO2 passivation layer on top of one of the resonators was slowly etched in several consecutive steps and frequency shifts were recorded showing of 33.4 cm2/ng. Higher order mode operation and relatively large size of the devices (high volume/surface ratio) along with wide gaps between the resonating body and the substrate are considered to be the main factors minimizing viscous damping in liquid.

Publication Date

12-12-2014

Publication Title

Proceedings of IEEE Sensors

Volume

2014-December

Issue

December

Number of Pages

1948-1951

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/ICSENS.2014.6985413

Socpus ID

84931043541 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84931043541

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