Title

Substrate-Blind Photonic Integration Based On High-Index Glass Materials

Keywords

Chalcogenide glasses; flexible photonics; graphene; integrated optical devices; metal oxides; resonators; sensors; waveguides

Abstract

Conventional photonic integration technologies are inevitably substrate-dependent, as different substrate platforms stipulate vastly different device fabrication methods and processing compatibility requirements. Here we capitalize on the unique monolithic integration capacity of composition-engineered non-silicate glass materials (amorphous chalcogenides and transition metal oxides) to enable multifunctional, multi-layer photonic integration on virtually any technically important substrate platforms. We show that high-index glass film deposition and device fabrication can be performed at low temperatures (< 250 °C) without compromising their low loss characteristics, and is thus fully compatible with monolithic integration on a broad range of substrates including semiconductors, plastics, textiles, and metals. Application of the technology is highlighted through three examples: demonstration of high-performance mid-IR photonic sensors on fluoride crystals, direct fabrication of photonic structures on graphene, and 3-D photonic integration on flexible plastic substrates.

Publication Date

1-1-2014

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

9277

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.2073972

Socpus ID

84938154019 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84938154019

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