Title

Linear Bolometer Array Using A High Tcr VoX-Au Film

Keywords

Bolometer; MEMS; TCR; Vanadium oxide

Abstract

We present a design for a low-noise bolometer linear array based on the temperature-dependent conductivity of a VOx- Au film. Typical thin film bolometers must compromise between low resistivity to limit Johnson noise and high temperature coefficient of resistivity (TCR) to maximize responsivity. Our vanadium oxide is alloyed with a small concentration of gold by co-sputtering, which gives very low resistivity and very high TCR simultaneously. The film is fabricated on an air bridge device having high thermal conductivity and small thermal time constant optimized for 30 to 60 Hz frame rates. The linear array functions as a low-power profile sensor with a modulated bias. For 1 V bias, we predict responsivity exceeding 1200 V/W. Johnson noise dominates with predicted NEP values as low as 1.0 × 10 -11 W/Hz1/2. Preliminary device testing shows film resistivity below 2.5 Ω-cm with TCR exceeding -2.0%. Preliminary measurements of NEP and D* are reported. © 2014 SPIE.

Publication Date

1-1-2014

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

9070

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.2050434

Socpus ID

84906269611 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84906269611

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