Title

Engineering Chalcogenide Materials - From Bulk Optics To Cmos-Compatible Microelectronic Integration

Abstract

Next generation optical and opto-electronic components will require materials that possess unique, spectrally agile, multifunctional attributes that can be produced via low(er) cost manufacturing processes. Material compositional design and novel processing and fabrication strategies are essential to the success in realizing new materials that fit application-specific needs. Efforts by our team have focused on use of IR transmissive glasses and crystalline alloys in planar form on Si, which lend themselves to integration with an on-chip source and semiconductor detector. Such devices exploit the enhanced sensitivity that comes from using probe light in the mid-infrared region (MIR) where applications such as sensors require materials which have spectral response that overlaps with fundamental molecular fingerprints of target analytes. We report progress on designing CMOScompatible materials and processes aimed at adding to the 'photonic material toolbox' which exploit other functions including phase change or high mobility materials for emerging electronics applications.

Publication Date

1-1-2014

Publication Title

ECS Transactions

Volume

61

Issue

6

Number of Pages

73-79

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1149/06106.0073ecst

Socpus ID

84925247988 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84925247988

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