Title

Solution Processing And Resist-Free Nanoimprint Fabrication Of Thin Film Chalcogenide Glass Devices: Inorganic-Organic Hybrid Photonic Integration

Keywords

Chalcogenide glasses; Hybrid photonics; Polymer substrates; Solution deposition; Thermal nanoimprints

Abstract

Organic polymer materials are widely credited with extreme versatility for thin film device processing. However, they generally lack the high refractive indices of inorganic semiconductors essential for tight optical confinement in planar integrated photonic circuits. Inorganic-organic hybrid photonic systems overcome these limits by combining both types of materials, although such hybrid integration remains challenging given the vastly different properties of the two types of materials. In this paper, a new approach is used to realize inorganic-organic hybrid photonics using chalcogenide glass (ChG) materials. Known as an amorphous semiconductor, the glass possesses high refractive indices, and can be prepared in a thin film form through solution deposition and patterned via direct thermal nanoimprinting, processing methods traditionally exclusive to polymer materials only. Sub-micrometer waveguides, microring resonators, and diffraction gratings fabricated from solution processed (SP) ChG films can be monolithically integrated with organic polymer substrates to create mechanically flexible, high-index-contrast photonic devices. The resonators exhibit a high quality factor (Q-factor) of 80 000 near 1550 nm wavelength. Free-standing, flexible ChG gratings whose diffraction properties can be readily tailored by conformal integration on nonplanar surfaces are also demonstrated. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Publication Date

1-1-2014

Publication Title

Advanced Optical Materials

Volume

2

Issue

8

Number of Pages

759-764

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1002/adom.201400068

Socpus ID

84906488965 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84906488965

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