Multimodal Laser Micromachined Shadow Masks For Rapid Patterning Of Sub-5 Μm Organic And Inorganic Layers For Lab-On-A-Chip Applications

Keywords

Inorganic patterning; Laser micromachining; Organic; Shadow mask

Abstract

We present a makerspace microfabrication-enabled shadow mask technology utilizing a multimodal Nd:YAG laser with the capability to switch between 1064 nm, 532 nm, and 355 nm wavelengths. This laser allows for the micromachining of a variety of materials from silicon to glass to polymers to metals to biomaterials. With such a laser, we report for the first time to our knowledge, metal and polymer shadow masks for rapid prototyping and robust design to device translation for feature sizes in the sub-5 μm range. In fact, our recent results demonstrate repeatable shadow mask features down to approximately 1.5 μm on Kapton® substrates. Additionally, the demonstration of robust and repeatable patterning of organic and inorganic layers is performed with these masks. We anticipate such a technology will be vital for Lab-on-a-Chip, biosensor, environmental microsensors, and other microfluidic applications.

Publication Date

1-1-2018

Publication Title

22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018

Volume

1

Number of Pages

578-581

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

85079867314 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/85079867314

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