Finite Element Modeling Of Resonators

Keywords

Anchor loss; Clamping loss; Design cycle; Finite element analysis (FEA); Finite element method (FEM); Microelectro mechanical (MEMS) resonator; Modal analysis; Quailty factor; Signal filtering

Abstract

Finite element analysis (FEA) is a numerical method for finding an approximate solution to a set of differential equations. This method, widely known as the finite element method/finite element modeling or FEM, is commonly used in many engineering disciplines to model the behavior of complex systems. FEM can substantially shorten the design cycle and dramatically cut the research and development cost. The most widely used application of FEM in MEMS resonators is modal analysis. The quality factor (Q) of a mechanical resonator is a very important parameter that affects the performance in any application perceived for the resonator. Anchor loss, or clamping loss, is the quantification of the elastic energy radiation from the resonator through the structural elements connecting it to a frame. An important application of micromechanical resonators is in signal filtering when very high selectivity is required.

Publication Date

8-21-2015

Publication Title

Resonant MEMS: Principles, Modeling, Implementation, and Applications

Number of Pages

97-117

Document Type

Article; Book Chapter

Personal Identifier

scopus

DOI Link

https://doi.org/10.1002/9783527676330.ch5

Socpus ID

85027709551 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/85027709551

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