On-Chip Mid-Infrared Gas Detection Using Chalcogenide Glass Waveguide

Abstract

We demonstrate an on-chip sensor for room-temperature detection of methane gas using a broadband spiral chalcogenide glass waveguide coupled with off-chip laser and detector. The waveguide is fabricated using UV lithography patterning and lift-off after thermal evaporation. We measure the intensity change due to the presence and concentration of methane gas in the mid-infrared (MIR) range. This work provides an approach for broadband planar MIR gas sensing.

Publication Date

4-4-2016

Publication Title

Applied Physics Letters

Volume

108

Issue

14

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1063/1.4945667

Socpus ID

84966702481 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84966702481

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