On-Chip Mid-Infrared Gas Detection Using Chalcogenide Glass Waveguide
Abstract
We demonstrate an on-chip sensor for room-temperature detection of methane gas using a broadband spiral chalcogenide glass waveguide coupled with off-chip laser and detector. The waveguide is fabricated using UV lithography patterning and lift-off after thermal evaporation. We measure the intensity change due to the presence and concentration of methane gas in the mid-infrared (MIR) range. This work provides an approach for broadband planar MIR gas sensing.
Publication Date
4-4-2016
Publication Title
Applied Physics Letters
Volume
108
Issue
14
Document Type
Article
Personal Identifier
scopus
DOI Link
https://doi.org/10.1063/1.4945667
Copyright Status
Unknown
Socpus ID
84966702481 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/84966702481
STARS Citation
Han, Z.; Lin, P.; Singh, V.; Kimerling, L.; and Hu, J., "On-Chip Mid-Infrared Gas Detection Using Chalcogenide Glass Waveguide" (2016). Scopus Export 2015-2019. 2507.
https://stars.library.ucf.edu/scopus2015/2507