Low-Loss Photonic Device In Ge-Sb-S Chalcogenide Glass
Abstract
Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge23Sb7S70 chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low propagation loss of 0.5 dB/cm and microdisk resonators with an intrinsic quality factor (Q-factor) of 1.2 × 106 were demonstrated. Both figures represent, to the best of our knowledge, the best low-loss results reported thus far in submicrometer single-mode chalcogenide glass devices.
Publication Date
7-1-2016
Publication Title
Optics Letters
Volume
41
Issue
13
Number of Pages
3090-3093
Document Type
Article
Personal Identifier
scopus
DOI Link
https://doi.org/10.1364/OL.41.003090
Copyright Status
Unknown
Socpus ID
84978924771 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/84978924771
STARS Citation
Du, Qingyang; Huang, Yizhong; Li, Junying; Kita, Derek; and Michon, Jérôme, "Low-Loss Photonic Device In Ge-Sb-S Chalcogenide Glass" (2016). Scopus Export 2015-2019. 3092.
https://stars.library.ucf.edu/scopus2015/3092