Low-Loss Photonic Device In Ge-Sb-S Chalcogenide Glass

Abstract

Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge23Sb7S70 chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low propagation loss of 0.5 dB/cm and microdisk resonators with an intrinsic quality factor (Q-factor) of 1.2 × 106 were demonstrated. Both figures represent, to the best of our knowledge, the best low-loss results reported thus far in submicrometer single-mode chalcogenide glass devices.

Publication Date

7-1-2016

Publication Title

Optics Letters

Volume

41

Issue

13

Number of Pages

3090-3093

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1364/OL.41.003090

Socpus ID

84978924771 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84978924771

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