Title
Experimental And Numerical Investigation Of Laser-Based Short Wavelength Plasma Sources
Abstract
Laser-based plasma lamps are of particular interest in the semiconductor industry. This study examines the optimum regions of laser-plasma operational space for a number of intense laser-irradiated mass-limited droplet source scenarios.
Publication Date
1-7-2016
Publication Title
2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015
Volume
2
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1109/CLEOPR.2015.7375987
Copyright Status
Unknown
Socpus ID
84964050217 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/84964050217
STARS Citation
Parchamy, H.; Szilagyi, J.; Masnavi, M.; and Richardson, M., "Experimental And Numerical Investigation Of Laser-Based Short Wavelength Plasma Sources" (2016). Scopus Export 2015-2019. 4084.
https://stars.library.ucf.edu/scopus2015/4084