Experimental And Numerical Investigation Of Laser-Based Short Wavelength Plasma Sources

Abstract

Laser-based plasma lamps are of particular interest in the semiconductor industry. This study examines the optimum regions of laser-plasma operational space for a number of intense laser-irradiated mass-limited droplet source scenarios.

Publication Date

1-7-2016

Publication Title

2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015

Volume

2

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/CLEOPR.2015.7375987

Socpus ID

84964050217 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84964050217

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