Mode-Synthesizing Atomic Force Microscopy For 3D Reconstruction Of Embedded Low-Density Dielectric Nanostructures

Keywords

3D reconstruction; acoustic microscopy; atomic force microscopy; dielectric; nanoscale subsurface imaging; nanoscale tomography

Abstract

Challenges in nanoscale characterization call for non-invasive, yet sensitive subsurface characterization of low-density materials such as polymers. In this work, we present new evidence that mode-synthesizing atomic force microscopy can be used to detect minute changes in low-density materials, such as those engendered in electro-sensitive polymers during electron beam lithography, surpassing all common nanoscale mechanical techniques. Moreover, we propose 3D reconstruction of the exposed polymer regions using successive high-resolution frames acquired at incremental depths inside the sample. In addition, the results clearly show the influence of increasing dwell time on the depth profile of the nano-sized exposed regions. Hence, the simple approach described here can be used for achieving sensitive nanoscale tomography of soft materials with promising applications in material sciences and biology. [Figure not available: see fulltext.]

Publication Date

7-25-2015

Publication Title

Nano Research

Volume

8

Issue

7

Number of Pages

2199-2205

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1007/s12274-015-0728-8

Socpus ID

84937969228 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84937969228

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