Heterogeneous Microring And Mach-Zehnder Modulators Based On Lithium Niobate And Chalcogenide Glasses On Silicon

Abstract

Thin films of lithium niobate are wafer bonded onto silicon substrates and rib-loaded with a chalcogenide glass, Ge23Sb7S70, to demonstrate strongly confined single-mode submicron waveguides, microring modulators, and Mach-Zehnder modulators in the telecom C band. The 200 μm radii microring modulators present 1.2 dB/cm waveguide propagation loss, 1.2 × 105 quality factor, 0.4 GHz/V tuning rate, and 13 dB extinction ratio. The 6 mm long Mach-Zehnder modulators have a halfwave voltage-length product of 3.8 V.cm and an extinction ratio of 15 dB. The demonstrated work is a key step towards enabling wafer scale dense on-chip integration of high performance lithium niobate electro-optical devices on silicon for short reach optical interconnects and higher order advanced modulation schemes.

Publication Date

8-24-2015

Publication Title

Optics Express

Volume

23

Issue

17

Number of Pages

22746-22752

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1364/OE.23.022746

Socpus ID

84957591851 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84957591851

This document is currently not available here.

Share

COinS