Support Loss Evasion In Breathing Mode High-Order Silicon Disc Resonators

Abstract

Leakage of elastic waves through the anchors is commonly reported as the dominant Q-limiting mechanism in micro-resonators. Bulk mode silicon-based disk resonators are amongst the most attractive designs in literature as they could potentially offer high Q if supported from the center. However, such supporting scheme adds to the fabrication complexity and as such, side supported designs have been explored to achieve high Q for certain resonance modes.

Publication Date

10-31-2017

Publication Title

IEEE International Ultrasonics Symposium, IUS

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/ULTSYM.2017.8091656

Socpus ID

85039456161 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/85039456161

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