Fabrication Of Micro-Optical Magnetic Sensor

Keywords

Magnetic Sensors; Micro-Fabrication; MOEMS

Abstract

In this work, we report the micro fabrication of several types of resonant micro magnetic field sensors where we can use an optical technique to read the magnetic variations (MOEMS). The fabrication process we have used, is a simple process in a SOI wafer with 6 μm of active layer and 5 μm of sacrificial SiO2.

Publication Date

10-30-2017

Publication Title

2017 Photonics North, PN 2017

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/PN.2017.8090589

Socpus ID

85040591444 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/85040591444

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