Irradiation Of On-Chip Chalcogenide Glass Waveguide Mid-Infrared Gas Sensor

Keywords

chalcogenide glass; gas detection; gas sensor; integrated photonics; radiation

Abstract

We measure the effect of radiation damage on an on-chip mid-infrared methane gas sensor made using a spiral chalcogenide glass waveguide. The sensor is fabricated using UV lithography and a lift-off process after deposition of chalcogenide glass using a thermal evaporator. We measure the transmittance change of the sensor at varying concentrations of methane after varying doses of irradiation.

Publication Date

1-5-2017

Publication Title

Proceedings of IEEE Sensors

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/ICSENS.2016.7808675

Socpus ID

85010991045 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/85010991045

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