Title
Nonplanar Focal Plane With Silicon Based Photodetector
Abstract
A fabrication process is demonstrated to form curved image sensors based on CMOS image sensor technology. A stretchable polymer backplane is fabricated monolithically on the backside of the wafer before a DRIE etch is performed to segment the wafer and make the circuit stretchable.
Publication Date
11-20-2017
Publication Title
30th Annual Conference of the IEEE Photonics Society, IPC 2017
Volume
2017-January
Number of Pages
55-56
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1109/IPCon.2017.8116004
Copyright Status
Unknown
Socpus ID
85043500225 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/85043500225
STARS Citation
Ma, Zhao; Wang, Xiaochen; Cho, Hyoung Jin; and Renshaw, Kyle, "Nonplanar Focal Plane With Silicon Based Photodetector" (2017). Scopus Export 2015-2019. 7450.
https://stars.library.ucf.edu/scopus2015/7450