Ceo2: Rf Magnetron Sputtering Of Ceo2 Films

Publication Date

1-1-2018

Publication Title

Handbook of Thin Film Process Technology: 98/2 Recipes for Optical Materials

Document Type

Article; Book Chapter

Personal Identifier

scopus

DOI Link

https://doi.org/10.1201/9781351072793

Socpus ID

85060423876 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/85060423876

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