Tin-Gallium-Oxide-Based Uv-C Detectors

Keywords

Epitaxy; Gallium Oxide; Oxide Semiconductor; Solar Blind; Ultraviolet Detector; UV-C

Abstract

The emergence of conductive gallium oxide single crystal substrates offers the potential for vertical Schottky detectors operating in the UV-C spectral region. We report here on our recent work in the development of Tin Gallium oxide (TGO) thin film metal-semiconductor-metal (MSM) and Schottky detectors using plasma-assisted molecular beam epitaxy on c plane sapphire and bulk Ga2O3 substrates. Tin alloying of gallium oxide thin films was found to systematically reduce the optical band gap of the compound, providing tunability in the UV-C spectral region. Tin concentration in the TGO epilayers was found to be highly dependent on growth conditions, and Ga flux in particular. First attempts to demonstrate vertical Schottky photodetectors using TGO epilayers on bulk n-type Ga2O3 substrates were successful. Resultant devices showed strong photoresponse to UV-C light with peak responsivities clearly red shifted in comparison to Ga2O3 homoepitaxial Schottky detectors due to TGO alloying.

Publication Date

1-1-2018

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

10533

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.2302729

Socpus ID

85047437005 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/85047437005

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