Keywords

CMP, Copper, Electrochemistry, Glycine, H2O2, PH, Planarity, Removal rate, Surface analysis

Notes

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Graduation Date

2004

Semester

Summer

Advisor

Desai, Vimal

Degree

Master of Science (M.S.)

College

College of Engineering and Computer Science

Department

Mechanical, Materials, and Aerospace Engineering

Degree Program

Mechanical, Materials and Aerospace Engineering;

Format

application/pdf

Identifier

CFE0000120

URL

http://purl.fcla.edu/fcla/etd/CFE0000120

Language

English

Release Date

August 2004

Length of Campus-only Access

None

Access Status

Masters Thesis (Open Access)

Subjects

Dissertations, Academic -- Engineering and Computer Science; Engineering and Computer Science -- Dissertations, Academic

Included in

Engineering Commons

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