Keywords

rapid prototyping, micro fabrication, mems, microfluidics

Abstract

In the area of MEMS there exists a tremendous need for communication between the micro-device and the macro world. A standard protocol or at least multiple standards would be of great use. Electrical connections have been standardized for many uses and configurations by the integrated circuit industry. Standardization in the IC industry has created a marketplace for digital devices unprecedented. In addition to the number of "off the shelf" products available, there exists the possibility for consumers to mix and match many devices from many different manufacturers. This research proposes some similar solutions as those for integrated circuits for fluid connections and mechanical configurations that could be used on many different devices. In conjunction with offering the capability to facilitate communication between the micro and macro worlds, the packaging solutions should be easy to fabricate. Many devices are by nature non-standard, unique, designs that make a general solution difficult. At the same time, the micro-devices themselves will inevitably need to evolve some standardization. In BioMEMS devices the packaging issue is concerned with delivering a sample to the device, conducting the sample to the sensor or sensors, and removing the sample. Conducting the sample to the sensor or sensors is usually done with microchannels created by standard MEMS fabrication techniques. Many current designs then utilize conventional machining techniques to create the inlet and outlet for the sample. This work proposes a rapid prototyping method for creating the microchannel and inlet / outlet in simplified steps. The packages developed from this process proved to be an effective solution for many applications.

Notes

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Graduation Date

2006

Semester

Summer

Advisor

Cho, Hyoung-Jin

Degree

Master of Science (M.S.)

College

College of Engineering and Computer Science

Department

Mechanical, Materials and Aerospace Engineering;

Degree Program

Mechanical Engineering

Format

application/pdf

Identifier

CFE0001341

URL

http://purl.fcla.edu/fcla/etd/CFE0001341

Language

English

Length of Campus-only Access

None

Access Status

Masters Thesis (Open Access)

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