Title
A review of focused ion beam milling techniques for TEM specimen preparation
Abbreviated Journal Title
Micron
Keywords
focused ion beam; transmission electron microscopy (TEM); scanning; electron microscopy (SEM); secondary ion mass spectrometry (SIMS); TRANSMISSION ELECTRON-MICROSCOPY; LIFT-OUT; Microscopy
Abstract
The use of focused ion beam (FIB) milling for the preparation of transmission electron microscopy (TEM) specimens is described. The operation of the FIB instrument is discussed and the conventional and lift-out techniques for TEM specimen preparation and the advantages and disadvantages of each technique are detailed. The FIB instrument may be used for rapid site-specific preparation of both cross-section and plan view TEM specimens. (C) 1999 Elsevier Science Ltd. All rights reserved.
Journal Title
Micron
Volume
30
Issue/Number
3
Publication Date
1-1-1999
Document Type
Review
Language
English
First Page
197
Last Page
204
WOS Identifier
ISSN
0968-4328
Recommended Citation
"A review of focused ion beam milling techniques for TEM specimen preparation" (1999). Faculty Bibliography 1990s. 2645.
https://stars.library.ucf.edu/facultybib1990/2645
Comments
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