A review of focused ion beam milling techniques for TEM specimen preparation

    Authors

    L. A. Giannuzzi;F. A. Stevie

    Comments

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    Abbreviated Journal Title

    Micron

    Keywords

    focused ion beam; transmission electron microscopy (TEM); scanning; electron microscopy (SEM); secondary ion mass spectrometry (SIMS); TRANSMISSION ELECTRON-MICROSCOPY; LIFT-OUT; Microscopy

    Abstract

    The use of focused ion beam (FIB) milling for the preparation of transmission electron microscopy (TEM) specimens is described. The operation of the FIB instrument is discussed and the conventional and lift-out techniques for TEM specimen preparation and the advantages and disadvantages of each technique are detailed. The FIB instrument may be used for rapid site-specific preparation of both cross-section and plan view TEM specimens. (C) 1999 Elsevier Science Ltd. All rights reserved.

    Journal Title

    Micron

    Volume

    30

    Issue/Number

    3

    Publication Date

    1-1-1999

    Document Type

    Review

    Language

    English

    First Page

    197

    Last Page

    204

    WOS Identifier

    WOS:000081184300002

    ISSN

    0968-4328

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