Title

Solid micromechanical valves fabricated with in situ UV-LIGA assembled nickel

Authors

Authors

B. Li;Q. F. Chen

Comments

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Abbreviated Journal Title

Sens. Actuator A-Phys.

Keywords

in situ UV-LIGA assemble; robust microvalve; solid nickel; MICROVALVE; STRENGTH; Engineering, Electrical & Electronic; Instruments & Instrumentation

Abstract

In situ UV-LlGA assembled robust microcheck valves with large flow rates (>10 ml/s, displacement related), high-pressure support ability (>10 MPa) and high operational frequencies (>10 kHz) made of nano-structured nickel were presented in this paper. The microvalve consists of an array of 80 single microvalves to achieve the required flow rates. A novel in situ UV-LIGA process was developed for the fabrication. Test results show that the forward flow rate is about 19 ml/s under pressure of 90 psi. The backward flow rate is negligible. The loading/unloading test results show that the flow rates were repeated very well over a large range of tested pressure differences. The reliability of the valve is ensured by the low stress valve design and the robust nano-structured nickel material fabricated. (C) 2005 Elsevier B.V. All rights reserved.

Journal Title

Sensors and Actuators a-Physical

Volume

126

Issue/Number

1

Publication Date

1-1-2006

Document Type

Article

Language

English

First Page

187

Last Page

193

WOS Identifier

WOS:000235103900028

ISSN

0924-4247

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