Solid micromechanical valves fabricated with in situ UV-LIGA assembled nickel

    Authors

    B. Li;Q. F. Chen

    Comments

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    Abbreviated Journal Title

    Sens. Actuator A-Phys.

    Keywords

    in situ UV-LIGA assemble; robust microvalve; solid nickel; MICROVALVE; STRENGTH; Engineering, Electrical & Electronic; Instruments & Instrumentation

    Abstract

    In situ UV-LlGA assembled robust microcheck valves with large flow rates ( > 10 ml/s, displacement related), high-pressure support ability ( > 10 MPa) and high operational frequencies ( > 10 kHz) made of nano-structured nickel were presented in this paper. The microvalve consists of an array of 80 single microvalves to achieve the required flow rates. A novel in situ UV-LIGA process was developed for the fabrication. Test results show that the forward flow rate is about 19 ml/s under pressure of 90 psi. The backward flow rate is negligible. The loading/unloading test results show that the flow rates were repeated very well over a large range of tested pressure differences. The reliability of the valve is ensured by the low stress valve design and the robust nano-structured nickel material fabricated. (C) 2005 Elsevier B.V. All rights reserved.

    Journal Title

    Sensors and Actuators a-Physical

    Volume

    126

    Issue/Number

    1

    Publication Date

    1-1-2006

    Document Type

    Article

    Language

    English

    First Page

    187

    Last Page

    193

    WOS Identifier

    WOS:000235103900028

    ISSN

    0924-4247

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