Cavity resonator, wireless passive sensors, pressure sensor, temperature sensors, robust antenna, microwave filter
This dissertation presents design challenges and promising solutions for temperature and pressure sensors which are highly desirable for harsh-environment applications, such as turbine engines. To survive the harsh environment consisting of high temperatures above 1000°C, high pressures around 300 psi, and corrosive gases, the sensors are required to be robust both electrically and mechanically. In addition, wire connection of the sensors is a challenging packaging problem, which remains unresolved as of today. In this dissertation, robust ceramic sensors are demonstrated for both high temperature and pressure measurements. Also, the wireless sensors are achieved based on microwave resonators. Two types of temperature sensors are realized using integrated resonator/antennas and reflective patches, respectively. Both types of the sensors utilize alumina substrate which has a temperature-dependent dielectric constant. The temperature in the harsh environment is wirelessly detected by measuring the resonant frequency of the microwave resonator, which is dependent on the substrate permittivity. The integrated resonator/antenna structure minimizes the sensor dimension by adopting a seamless design between the resonator sensor and antenna. This integration technique can be also used to achieve an antenna array integrated with cavity filters. Alternatively, the aforementioned reflective patch sensor works simultaneously as a resonator sensor and a radiation element. Due to its planar structure, the reflective patch sensor is easy for design and fabrication. Both temperature sensors are measured above 1000°C. A pressure sensor is also demonstrated for high-temperature applications. Pressure is detected via the change in resonant frequency of an evanescent-mode resonator which corresponds to cavity deformation under gas pressure. A compact sensor size is achieved with a post loading the cavity resonator and a low-profile antenna connecting to the sensor. Polymer-Derived-Ceramic (PDC) is developed and used for the sensor fabrication. The pressure sensor is characterized under various pressures at high temperatures up to 800°C. In addition, to facilitate sensor characterizations, a robust antenna is developed in order to wirelessly interrogate the sensors. This specially-developed antenna is able to survive a record-setting temperature of 1300°C.
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Doctor of Philosophy (Ph.D.)
College of Engineering and Computer Science
Electrical Engineering and Computer Science
Length of Campus-only Access
Doctoral Dissertation (Open Access)
Cheng, Haitao, "Integrated Microwave Resonator/antenna Structures for Sensor and Filter Applications" (2014). Electronic Theses and Dissertations, 2004-2019. 6675.