Abstract

Spectrally-selective un-cooled micro-bolometers have many military and industrial applications for infrared sensing and imaging, e.g. target acquisition and chemical analysis. In this work, a micro-bolometer was fabricated with integrated wavelength-selective absorber based on subwavelength metal-insulator-metal (MIM) resonators. The fabricated air-bridge structure used a vanadium oxide thin film as the bolometric element. A novel aqueous deposition method of depositing vanadium oxide was investigated and compared to traditional sputtered vanadium oxide to determine achievable temperature coefficient of resistance. The MIM absorber itself was investigated as a function of the dielectric used, and the strong dependence of the resonance spectrum on dispersion was revealed. Finally, the completed bolometers were characterized, and usual figures of merit for thermal infrared detectors were determined. Unlike previous efforts this research is aimed at putting the bolometer inside of the MIM absorber, thereby reducing thermal mass and the thermal time constant compared to those bolometers where the absorbers are just put on top.

Notes

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Graduation Date

2019

Semester

Summer

Advisor

Peale, Robert

Degree

Doctor of Philosophy (Ph.D.)

College

College of Sciences

Department

Physics

Degree Program

Physics

Format

application/pdf

Identifier

CFE0008076; DP0023215

URL

https://purls.library.ucf.edu/go/DP0023215

Language

English

Release Date

February 2020

Length of Campus-only Access

None

Access Status

Doctoral Dissertation (Open Access)

Restricted to the UCF community until February 2020; it will then be open access.

Included in

Physics Commons

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