Abstract
Quantum Cascade Lasers (QCLs) are semiconductor devices that, currently, have been observed to emit radiation from ~ 2.6 µm to 250 µm (1 to 100 terahertz range of frequencies). They have established themselves as the laser of choice for spectroscopic gas sensing in the mid-wavelength infrared (3-8 µm) and long-wavelength infrared (8-15 µm) region. In the 4-12 µm wavelength region, the highest performing QCL devices, in terms of wall-plug efficiency and continuous wave operation, are indium phosphide (InP) based. The ultimate goal is to incorporate this InP-based QCL technology to silicon (Si) substrate since most opto-electronics are Si-based. The main building blocks required for practical QCL-on-Si integrated platforms were demonstrated and will be covered in this presentation. The experimental results of a 40-stage indium phosphide based quantum cascade laser grown on a lattice-mismatched germanium-coated silicon substrate with metamorphic buffer (M-buffer) is discussed. The QCL's strain-balanced active region was composed of Al0.78In0.22As/In0.73Ga0.27As and an 8 µm-thick all-InP waveguide. Since the M-buffer was insulating, the wafer was processed into ridge-waveguide chips with lateral current injection scheme. Lasing was observed from 78K up to 170K for QCL-on-Si devices. Also discussed is the first room temperature operation of QCL grown on a lattice-mismatched gallium arsenide (GaAs) substrate with metamorphic buffer (M-buffer). Similar to QCL-on-Si, a lateral injection scheme was utilized since M-buffer was insulating. Lasing was observed from 78K up to 303 K for QCL-on-GaAs. Material characterization of QCL-on-InP, QCL-on-GaAs, and QCL-on-Si using Transverse Electron Microscopy (TEM) will also be covered in this presentation. A very small section, 10 µm x 10 µm, of the QCL active region was used to give an estimate of the defect density for each of the QCL configuration. Lastly, characterization of the material quality of the remaining 6-inch wafer of QCL-on-Si using photoluminescence spectroscopy (PL) will be discussed. This method helped determined the best portion of the remaining material for subsequent processing into ridge waveguide devices.
Notes
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Graduation Date
2020
Semester
Summer
Advisor
Lyakh, Arkadiy
Degree
Doctor of Philosophy (Ph.D.)
College
College of Engineering and Computer Science
Department
Electrical and Computer Engineering
Degree Program
Electrical Engineering
Format
application/pdf
Identifier
CFE0008167; DP0023510
URL
https://purls.library.ucf.edu/go/DP0023510
Language
English
Release Date
August 2021
Length of Campus-only Access
1 year
Access Status
Doctoral Dissertation (Open Access)
STARS Citation
Go, Rowel, "Indium Phosphide Based Quantum Cascade Lasers Grown on Silicon Substrate" (2020). Electronic Theses and Dissertations, 2020-2023. 218.
https://stars.library.ucf.edu/etd2020/218