Title
Design And Fabrication Process For Electrostatic Side-Drive Motors
Abbreviated Journal Title
J. Micromech. Microeng.
Keywords
Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics
Abstract
A new process technique has been implemented for the fabrication of electrostatic side-drive micromotors. In the present technique, polyimide has been used as the hub material for fabricating the 4-pole rotor, 8-pole rotor and the wobble micromotors. Process techniques to achieve the micromachining of these structures are discussed in detail.
Journal Title
Journal of Micromechanics and Microengineering
Volume
5
Issue/Number
1
Publication Date
1-1-1995
Document Type
Article
Language
English
First Page
11
Last Page
17
WOS Identifier
ISSN
0960-1317
Recommended Citation
"Design And Fabrication Process For Electrostatic Side-Drive Motors" (1995). Faculty Bibliography 1990s. 1337.
https://stars.library.ucf.edu/facultybib1990/1337
Comments
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