Design And Fabrication Process For Electrostatic Side-Drive Motors

    Authors

    A. G. Frangoul;K. B. Sundaram

    Comments

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    Abbreviated Journal Title

    J. Micromech. Microeng.

    Keywords

    Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics

    Abstract

    A new process technique has been implemented for the fabrication of electrostatic side-drive micromotors. In the present technique, polyimide has been used as the hub material for fabricating the 4-pole rotor, 8-pole rotor and the wobble micromotors. Process techniques to achieve the micromachining of these structures are discussed in detail.

    Journal Title

    Journal of Micromechanics and Microengineering

    Volume

    5

    Issue/Number

    1

    Publication Date

    1-1-1995

    Document Type

    Article

    Language

    English

    First Page

    11

    Last Page

    17

    WOS Identifier

    WOS:A1995QT49200003

    ISSN

    0960-1317

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