Title

Design And Fabrication Process For Electrostatic Side-Drive Motors

Authors

Authors

A. G. Frangoul;K. B. Sundaram

Comments

Authors: contact us about adding a copy of your work at STARS@ucf.edu

Abbreviated Journal Title

J. Micromech. Microeng.

Keywords

Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics

Abstract

A new process technique has been implemented for the fabrication of electrostatic side-drive micromotors. In the present technique, polyimide has been used as the hub material for fabricating the 4-pole rotor, 8-pole rotor and the wobble micromotors. Process techniques to achieve the micromachining of these structures are discussed in detail.

Journal Title

Journal of Micromechanics and Microengineering

Volume

5

Issue/Number

1

Publication Date

1-1-1995

Document Type

Article

Language

English

First Page

11

Last Page

17

WOS Identifier

WOS:A1995QT49200003

ISSN

0960-1317

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