Title

Effects Of Surface-Scatter On The Optical-Performance Of X-Ray Synchrotron Beam-Line Mirrors

Authors

Authors

J. E. Harvey; K. L. Lewotsky;A. Kotha

Comments

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Abbreviated Journal Title

Appl. Optics

Keywords

SYNCHROTRON BEAM LINE MIRRORS; OPTICAL FABRICATION TOLERANCES; SURFACE; SCATTER PHENOMENA; Optics

Abstract

The increased availability of advanced synchrotron radiation sources is resulting in a resurgence of activity in the field of x-ray and extreme ultraviolet imaging systems. However, scattering effects caused by residual optical fabrication errors frequently dominate geometrical design errors in the degradation of image quality at these very short wavelengths. Traditional optical design and analysis techniques (geometrical ray tracing) are therefore inadequate for predicting the performance of high-resolution synchrotron beam-line optics. A surface-scattering theory must be implemented to model the image degradation effects of residual surface irregularities over the entire range of relevant spatial frequencies. This includes small-angle scattering effects caused by mid-spatial-frequency surface errors that fall between the traditional figure and finish specifications. Performance predictions are presented parametrically to provide insight into the optical fabrication tolerances necessary to meet the requirements of a specific application.

Journal Title

Applied Optics

Volume

34

Issue/Number

16

Publication Date

1-1-1995

Document Type

Article

Language

English

First Page

3024

Last Page

3032

WOS Identifier

WOS:A1995RB34400029

ISSN

0003-6935

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