Title
Effects Of Process Errors On The Diffraction Characteristics Of Binary Dielectric Gratings
Abbreviated Journal Title
Appl. Optics
Keywords
DIFFRACTIVE OPTICS; OPTICAL FABRICATION; DIFFRACTION MATHEMATICAL MODELS; Optics
Abstract
The effects of fabrication errors on the predicted performance of surface-relief phase gratings are analyzed with a rigorous vector diffraction technique. For binary elements, errors in the dimensions of the profile [depth, linewidth (fill factor), and grating period], as well as errors in the shape of the profile, are investigated. It is shown that the dimension errors do not have a significant effect on grating performance when the grating is designed for either maximum or minimum diffraction efficiency. A trapezoid is used to model the shape error of the profile. For the first time, design rules that significantly reduce the effects of any shape error are presented.
Journal Title
Applied Optics
Volume
34
Issue/Number
14
Publication Date
1-1-1995
Document Type
Article; Proceedings Paper
Language
English
First Page
2430
Last Page
2435
WOS Identifier
ISSN
0003-6935
Recommended Citation
"Effects Of Process Errors On The Diffraction Characteristics Of Binary Dielectric Gratings" (1995). Faculty Bibliography 1990s. 1436.
https://stars.library.ucf.edu/facultybib1990/1436
Comments
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