Effects Of Process Errors On The Diffraction Characteristics Of Binary Dielectric Gratings

    Authors

    D. A. Pommet; E. B. Grann;M. G. Moharam

    Comments

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    Abbreviated Journal Title

    Appl. Optics

    Keywords

    DIFFRACTIVE OPTICS; OPTICAL FABRICATION; DIFFRACTION MATHEMATICAL MODELS; Optics

    Abstract

    The effects of fabrication errors on the predicted performance of surface-relief phase gratings are analyzed with a rigorous vector diffraction technique. For binary elements, errors in the dimensions of the profile [depth, linewidth (fill factor), and grating period], as well as errors in the shape of the profile, are investigated. It is shown that the dimension errors do not have a significant effect on grating performance when the grating is designed for either maximum or minimum diffraction efficiency. A trapezoid is used to model the shape error of the profile. For the first time, design rules that significantly reduce the effects of any shape error are presented.

    Journal Title

    Applied Optics

    Volume

    34

    Issue/Number

    14

    Publication Date

    1-1-1995

    Document Type

    Article; Proceedings Paper

    Language

    English

    First Page

    2430

    Last Page

    2435

    WOS Identifier

    WOS:A1995QX40200006

    ISSN

    0003-6935

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